NEW USER
separator
Forgot
Password?
separator
separator
FacebookTwitterLinkedInYouTube
separator
Global Semiconductor Alliance Logo

Process Control Monitoring Checklist

GSA’s AMS/RF PCM/Process Checklist Sub-Working developed a checklist that provides (1) a recommended list of parameters that foundries should measure (i.e., test), (2) a uniform way to measure each parameter (i.e., describe the measurement) and (3) a consistent way to describe the test data.

The checklist includes:

  • Device (e.g., FET)
  • Parameter (e.g., Drain-Source Breakdown)
  • Parameter Measurement Definition
  • Parameter Class (e.g., Reliability)
  • Units (e.g., Volts)
  • Layer (s)
  • Type (e.g., N/P)
  • Category (e.g., Pass/Fail)
  • Structure Information

Fabless and fab-lite companies, which are the targeted users of the Checklist, benefit from using the tool as it helps them better understand and use the parameter data they receive from their foundry partners. Better understanding yield and how it is affected by various PCM parameters allows fabless companies to design higher yielding chips.

Visit the A/MS Working Group page for more details about current initiatives.

Bookmark the permalink.